JPH0612488Y2 - 角度測定装置 - Google Patents
角度測定装置Info
- Publication number
- JPH0612488Y2 JPH0612488Y2 JP8261589U JP8261589U JPH0612488Y2 JP H0612488 Y2 JPH0612488 Y2 JP H0612488Y2 JP 8261589 U JP8261589 U JP 8261589U JP 8261589 U JP8261589 U JP 8261589U JP H0612488 Y2 JPH0612488 Y2 JP H0612488Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotary
- code plate
- angle
- measuring device
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8261589U JPH0612488Y2 (ja) | 1989-07-13 | 1989-07-13 | 角度測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8261589U JPH0612488Y2 (ja) | 1989-07-13 | 1989-07-13 | 角度測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0321708U JPH0321708U (en]) | 1991-03-05 |
JPH0612488Y2 true JPH0612488Y2 (ja) | 1994-03-30 |
Family
ID=31629591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8261589U Expired - Lifetime JPH0612488Y2 (ja) | 1989-07-13 | 1989-07-13 | 角度測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0612488Y2 (en]) |
-
1989
- 1989-07-13 JP JP8261589U patent/JPH0612488Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0321708U (en]) | 1991-03-05 |
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